Translation of "Weißlichtinterferometrie" in English

The measurement principle of white light interferometry is used.

The layer thickness is preferably determined contactlessly by means of white light interferometry.

The dimensions of the substrate can be determined by means of white light interferometry according to EN ISO 25178.

The white-light interferometry measuring method utilizes the interference of a broad-band light such as that of white light.

White light interferometry is suited to checking the roughness or the topography of a surface.

The measuring unit works according to the principal of white light interferometry and has an axial resolution of 0.1 nm.

With regard to this, the measuring principle is based on white-light interferometry (short-coherent interferometry), as is described in greater detail in the documents mentioned at the outset.

Relevant technologies for this are, for example, light sectioning, fringe projection, photogrammetry, white light interferometry, holography, time of flight, hyperspectral imaging or confocal measuring methods.

With white light interferometry, the topographies of both rough and smooth objects can be measured and captured in a very precise way.

In contrast to other techniques such as white-light interferometry this enables a much larger measurement field," describes Weckenmann the applications and benefits of focus variation.

Using geometric coherence, the depth information is then extracted. Other methods are available including time-of-flight which is still limited to low resolution sensors, or white light interferometry for highly accurate, but extremely slow acquisition.

3D-Shape GmbH performs complex surface measurements using the principle of white light interferometry, advanced sensors, 3D image processing and powerful camera technology from Mikrotron GmbH.

In white light interferometry, a light with a short coherence length is used, so that colored indifferences arise when the path lengths within the reference and object beam are nearly equal.

The invention is directed to an optically corrective microprobe for white light interferometry, a method for producing the dispersion-correcting reference beamsplitter used for this purpose, and an arrangement for white light interferometry outfitted therewith.

The method according to claim 2, used in conjunction with a white light interferometry method.

Table 1 gives the roughness values determined using atomic force microscopy for two flat steel product specimens according to the invention E 1, E 2, processed in the abovementioned way, the roughness values determined using white-light interferometry and the directed reflection in the state obtained after re-rolling.

One suggestion for a measuring device in which measurements can be performed even in cavities, using white-light interferometry, is shown in German DE 197 21 843 C1.

It is provided that the surface topography is measured with the aid of white-light interferometry, the thickness of the layer is measured by the principle of reflectometry, and by using, for both measurements, a shared radiation source having an electromagnetic radiation spectrum, which is reflected from the layer surface in a first wavelength range contained in the radiation spectrum and which penetrates into the layer in a second wavelength range contained in the radiation spectrum.

The method of claim 1, wherein a radiation spectrum in a wavelength range of 300 nm to 1500 nm is used and for white-light interferometry the first wavelength range of between 300 nm and 900 nm is used, and for reflectometry the second wavelength range of between 900 nm and 1500 nm is used.

It should be noted, however, that the topography of this surface, as an alternative thereto, can for example also be ascertained by means of point-based or line-based deflectometry, by examination in confocal, in particular chromatically confocal, systems, by means of interferometry, in particular by means of white light interferometry, by means of computed tomography (CT) using visible light or using X-rays, by means of triangulation or else in a tactile measuring method, for instance in a coordinate measuring machine.

Up to know, other measurement techniques than the pure confocal microscopy are used for thickness measurements of thin layers, for example white light interferometry.

In the case of white light interferometry, a light of low coherence length is used, so that the result is color interferences, when the path length in the reference beam or the object beam is nearly equal.

Ranging from deflectometry and multi-stereo measurement to white-light interferometry, our systems offer the ideal measurement process for any surface and form.

We will carry out a complete morphometric analysis of shatter cone surfaces by applying, for the first time, white light interferometry, and atomic force microscopy (AFM).

In contrast to scanning white light interferometry, both information channels are intrinsicly decoupled, yielding robust evaluation strategies.

Using white light interferometry an object is illuminated with white light. By means of a beam splitter this light is separated into a reference beam (reflected to a reference mirror) and an object beam that strikes the object itself.

To be highlighted in this regard are non-destructive measurements by means of contactless, optical processes, for example white light interferometry or confocal microscopy.